Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 2015.11a
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- Pages.167-167
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- 2015
SiC composite formed by Si vapor diffusion into porous graphite
다공질 그래파이트내부로 Si 증발입자 확산에 의해 형성되는 SiC 복합재료
Abstract
SiC thin films made by vapor silicon infiltration into porous graphite can be obtained for shorter time than liquid silicon. Si diffusion coefficient is estimated by comparing experiment results with quadratic equation obtained by Fick's second law.
Keywords