한국표면공학회:학술대회논문집 (Proceedings of the Korean Institute of Surface Engineering Conference)
- 한국표면공학회 2015년도 춘계학술대회 논문집
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- Pages.84-84
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- 2015
이중 주파수를 이용한 펄스 유도 결합 플라즈마 특성 연구
- Kim, Gi-Hyeon (Dept. of Advanced Materials, Sungkyunkwan University) ;
- Kim, Tae-Hyeong (Dept. of Advanced Materials, Sungkyunkwan University) ;
- Lee, Seung-Min (Dept. of Advanced Materials, Sungkyunkwan University) ;
- Lee, Cheol-Hui (Dept. of Advanced Materials, Sungkyunkwan University) ;
- Kim, Gyeong-Nam (Dept. of Advanced Materials, Sungkyunkwan University) ;
- Bae, Jeong-Un (Dept. of Advanced Materials, Sungkyunkwan University) ;
- Yeom, Geun-Yeong (Dept. of Advanced Materials, Sungkyunkwan University)
- 발행 : 2015.05.07