Design and Analysis of Permanent Magnet Array for Development of Large Area Magnetron Sputtering Sources

Lee, Ye-Lim (Department of Materials Science and Engineering, Graduate School of Energy Science and Technology, Chungnam National University) ;
Kuchi, Rambabu (Department of Materials Science and Engineering, Graduate School of Energy Science and Technology, Chungnam National University) ;
Surabhi, Srivathsava (Department of Materials Science and Engineering, Graduate School of Energy Science and Technology, Chungnam National University) ;
You, Shin-Jae (Department of Physics, Chungnam National University) ;
Jeong, Jong-Ryul (Department of Materials Science and Engineering, Graduate School of Energy Science and Technology, Chungnam National University)