대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2015년도 제46회 하계학술대회
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- Pages.1140-1140
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- 2015
열처리조건에 따른 MIM 박막의 Capacitance-Voltage 특성
C-V Characteristics of MIM Thin Film with Annealing Conditions
- Kim, Jin-Sa (Chosun College of Science & Technology) ;
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Choi, Young-Il
(Chosun College of Science & Technology) ;
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Song, Min-Jong
(Gwanju Health College University) ;
- Shin, Cheol-Gi (Bucheon University) ;
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Choi, Woon-Shik
(Sehan University)
- 발행 : 2015.07.15
초록
In this paper, the MIM thin films were deposited on Si substrate by sputtering method. And MIM thin films were annealed at
키워드