한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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- Pages.179.1-179.1
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- 2015
Transient Behaviors of ZnO Thin Films on a Transparent, Flexible Polyethylene Terephthalate Substrate
- Kim, Yongjun (College of Information and Communication Engineering, Sungkyunkwan University) ;
- Lee, Hoseok (Department of Material Science and Engineerin, Korea University) ;
- Yi, Junsin (College of Information and Communication Engineering, Sungkyunkwan University) ;
- Noh, Jinseo (Department of nano-physics, Gachon University)
- 발행 : 2015.08.24
초록
Thickness-dependent electrical, structural, and optical properties of zinc oxide (ZnO) thin films on polyethylene terephthalate (PET) substrates were investigated in the very thin thickness range of 20 to 120 nm. A very unusual transition phenomenon, in which electrical resistance increases with an increase in film thickness, was observed. From structural and compositional analyses, this transition behavior was explained to arise from metallic Zn agglomerates dispersed in non-crystalline Zn-O matrix. It was unveiled that film thickness more than 80 nm is required for the development of hexagonal crystal structure of ZnO. ZnO films on PET substrates exhibited high optical transmittance and good mechanical flexibility in the thickness range. The results of this study would provide a valuable guideline for the design of ZnO thin films on organic substrates for practical applications.