Proceedings of the Korean Society of Broadcast Engineers Conference (한국방송∙미디어공학회:학술대회논문집)
- 2014.11a
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- Pages.226-227
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- 2014
Humidity dependent size control of local anodic oxidation on graphene using Atomic Force Microscope
원자힘 현미경의 습도 조절에 의한 그래핀 국소 산화
- Ko, Seoknam (University of Seoul) ;
- Lee, Seong jun (University of Seoul) ;
- Son, Maengho (University of Seoul) ;
- Ahn, Doyeol (University of Seoul) ;
- Lee, Seung-Woong (Dongguk University)
- Published : 2014.11.07
Abstract
We demonstrate nanoscale local anodic oxidation (LAO) patterning on few layer graphene using atomic force microscope (AFM) at room temperature and normal atmosphere. We focus on the humidity dependency in nanoscale oxidation of graphene. The relationship between the oxidation size and the AFM setting values, such as set point, tip speed, and humidity are observed. By changing these values, proper parameters were found to produce features on demand size. This technique provides an easy way to form graphene oxide lithography without any chemical resists. We have obtained oxidation size down to 50-nm with 6-nm-height oxide barrier line with
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