Applications of quantitative convergent beam electron diffraction measurement for structural characterization

Convergent beam electron diffraction의 정량분석을 응용한 재료의 구조분석

The new algorithm was proposed to quantify symmetry recorded in convergent beam electron diffraction (CBED) patterns and symmetry mapping. The proposed algorithm is based on the normalized cross-correlation coefficient (${\gamma}$) for quantifying the amount of symmetry in a CBED pattern. The quantification and mapping procedures are automatically controlled by the script implemented in Gatan Digital Micrograph$^{(c)}$. We apply the quantitative CBED measurement to a strained Si sample to test the sensitivity to defects.