한국표면공학회:학술대회논문집 (Proceedings of the Korean Institute of Surface Engineering Conference)
- 한국표면공학회 2014년도 추계학술대회 논문집
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- Pages.47-51
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- 2014
Al-Mg 합금 박막의 압축응력 완화를 위한 어닐링 공정상의 입자 발달
Evolution of grains to relieve additional compressive stress developed in Al-Mg alloy films during thermal annealing
- 발행 : 2014.11.20
초록
In this work, a possible mechanism for grain evolution in Al-Mg alloy films during thermal annealing is suggested on the basis of the phase transition and the related residual stress. Al-Mg alloy films with compositions of 14.0 and 18.0 wt% Mg content were deposited on cold-rolled steel substrates by the direct current co-sputtering method using Al and Mg targets. After the deposition, the samples were thermally annealed at
키워드