Fabrication of capacitance sensor for real time harmful substance mass fraction mesurement
유독물질 질량분율 실시간 측정용 정전용량센서 제작
- Published : 2014.11.27
Abstract
In this study, a method of using a capacitance sensor was investigated as a means to measure the mass fraction of a type of harmful substance. Using MEMS process, we developed a capacitance sensor and studied the real time mass fraction with harmful substance mixture liquid.