Proceedings of the Korean Institute of Information and Commucation Sciences Conference (한국정보통신학회:학술대회논문집)
- 2014.10a
- /
- Pages.569-572
- /
- 2014
A CMOS Switched-Capacitor Interface Circuit for MEMS Capacitive Sensors
MEMS 용량형 센서를 위한 CMOS 스위치드-커패시터 인터페이스 회로
- Ju, Min-sik (Incheon National University) ;
- Jeong, Baek-ryong (Incheon National University) ;
- Choi, Se-young (Incheon National University) ;
- Yang, Min-Jae (Incheon National University) ;
- Yoon, Eun-jung (Incheon National University) ;
- Yu, Chong-gun (Incheon National University)
- Published : 2014.10.28
Abstract
This paper presents a CMOS switched-capacitor interface circuit for MEMS capacitive sensors. It consist of a capacitance to voltage converter(CVC), a second-order
본 논문에서는 MEMS 용량형 센서를 위한 CMOS 스위치드-커패시터 인터페이스 회로를 설계하였다. 설계된 회로는 커패시턴스-전압 변환기(CVC), 2차 스위치드 커패시터
Keywords
- MEMS Capacitive Sensor;
- Switched-Capacitor Circuit;
- Capacitance to Voltage Converter;
- Sigma-Delta Modulator