Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2014.02a
- /
- Pages.480.1-480.1
- /
- 2014
A Novel Solid Phase Epitaxy Emitter for Silicon Solar Cells
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Kim, Hyeon-Ho
;
-
Park, Seong-Eun
;
-
Kim, Yeong-Do
;
- Ji, Gwang-Seon ;
- An, Se-Won ;
-
Lee, Heon-Min
;
-
Lee, Hae-Seok
;
-
Kim, Dong-Hwan
-
김현호
(고려대학교 신소재공학과) ;
-
박성은
(고려대학교 신소재공학과) ;
-
김영도
(고려대학교 신소재공학과) ;
- 지광선 (LG전자 소재부품연구소) ;
- 안세원 (LG전자 소재부품연구소) ;
-
이헌민
(LG전자 소재부품연구소) ;
-
이해석
(고려대학교 신소재공학과) ;
-
김동환
(고려대학교 신소재공학과)
- Published : 2014.02.10
Abstract
In this study, we suggest the new emitter formation applied solid phase epitaxy (SPE) growth process using rapid thermal process (RTP). Preferentially, we describe the SPE growth of intrinsic a-Si thin film through RTP heat treatment by radio-frequency plasma-enhanced chemical vapor deposition (RF-PECVD). Phase transition of intrinsic a-Si thin films were taken place under
Keywords
- Solid Phase Epitaxy (SPE);
- radio-frequency plasma-enhanced chemical vapor deposition (RF-PECVD);
- Rapid Thermal Processing (RTP);
- Crystallization;
- Amorphous Silicon (a-Si)