Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2014.02a
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- Pages.181.2-181.2
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- 2014
Growth of Graphene Films from Solid-state Carbon Sources
- Kwak, Jinsung (School of Mechanical and Advanced Materials Engineering, Ulsan National Institute of Science and Technology) ;
- Kwon, Tae-Yang (School of Mechanical and Advanced Materials Engineering, Ulsan National Institute of Science and Technology) ;
- Chu, Jae Hwan (School of Mechanical and Advanced Materials Engineering, Ulsan National Institute of Science and Technology) ;
- Choi, Jae-Kyung (School of Mechanical and Advanced Materials Engineering, Ulsan National Institute of Science and Technology) ;
- Lee, Mi-Sun (School of Nano-Biotechnology and Chemical Engineering, Ulsan National Institute of Science and Technology) ;
- Kim, Sung Youb (School of Mechanical and Advanced Materials Engineering, Ulsan National Institute of Science and Technology) ;
- Shin, Hyung-Joon (School of Mechanical and Advanced Materials Engineering, Ulsan National Institute of Science and Technology) ;
- Park, Kibog (Opto-Electronics Convergence Group & Low Dimensional Carbon Materials Center, Ulsan National Institute of Science and Technology) ;
- Park, Jang-Ung (School of Nano-Biotechnology and Chemical Engineering, Ulsan National Institute of Science and Technology) ;
- Kwon, Soon-Yong (School of Mechanical and Advanced Materials Engineering, Ulsan National Institute of Science and Technology)
- Published : 2014.02.10
Abstract
A single-layer graphene has been uniformly grown on a Cu surface at elevated temperatures by thermally processing a poly (methyl methacrylate) (PMMA) film in a rapid thermal annealing (RTA) system under vacuum. The detailed chemistry of the transition from solid-state carbon to graphene on the catalytic Cu surface was investigated by performing in-situ residual gas analysis while PMMA/Cu-foil samples being heated, in conjunction with interrupted growth studies to reconstruct ex-situ the heating process. We found that the gas species of mass/charge (m/e) ratio of 15 (