한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
- /
- Pages.176.2-176.2
- /
- 2014
Soft Lithographic Patterning Method for Flexible Graphene-based Chemical Sensors with Heaters
- Kang, Min-a (Thin Film Materials Research Group, Korea Research Institute of Chemical Technology) ;
- Jung, Min Wook (Thin Film Materials Research Group, Korea Research Institute of Chemical Technology) ;
-
Myung, Sung
(Thin Film Materials Research Group, Korea Research Institute of Chemical Technology) ;
- Song, Wooseok (Thin Film Materials Research Group, Korea Research Institute of Chemical Technology) ;
- Lee, Sun Suk (Thin Film Materials Research Group, Korea Research Institute of Chemical Technology) ;
-
Lim, Jongsun
(Thin Film Materials Research Group, Korea Research Institute of Chemical Technology) ;
-
Park, Chong-Yun
(Department of Physics, Sungkyunkwan University) ;
-
An, Ki-Seok
(Thin Film Materials Research Group, Korea Research Institute of Chemical Technology)
- 발행 : 2014.02.10
초록
In this work, we demonstrated that the fabrication of flexible graphene-based chemical sensor with heaters by soft lithographic patterning method [1]. First, monolayer and multilayer graphene were prepared by thermal chemical vapor deposition transferred onto SiO2 / Si substrate in order to fabrication of patterned-sensor and -heater. Second, patterned-monolayer and multilayer graphene were detached through soft lithography process, which was transferred on top and bottom sides of PET film. Third, Au / Ti (Thickness : 100/30 nm) electrodes were deposited end of the patterned-graphene line by sputtering system. Finally, we measured sensor properties through injection of NO2 and CO2 gas on different temperature with voltage change of graphene heater.