Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2013.05a
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- Pages.775-776
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- 2013
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- 2005-8446(pISSN)
Analysis of effect for electron beam finishing and leakage magnetic field about a 5-axis stage in vacuum
진공용 5축 스테이지의 누설자기장과 전자빔 피니싱 영향 해석
- Published : 2013.05.29