Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2013.02a
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- Pages.652-652
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- 2013
Swift Synthesis of CVD-graphene Utilizing Conduction Heat Transfer
- Kim, Sang-Min (Korea Institute of Machinery & Materials (KIMM)) ;
- Mag-isa, Alexander E. (Korea Institute of Machinery & Materials (KIMM)) ;
- Oh, Chung-Seog (Kumoh National Institute of Technology (KIT)) ;
- Kim, Kwang-Seop (Korea Institute of Machinery & Materials (KIMM)) ;
- Kim, Jae-Hyun (Korea Institute of Machinery & Materials (KIMM)) ;
- Lee, Hak-Joo (Korea Institute of Machinery & Materials (KIMM)) ;
- Yoon, Jonghyuk (Samsung Techwin) ;
- Lee, Eun-Kyu (Samsung Techwin) ;
- Lee, Seung-Mo (Korea Institute of Machinery & Materials (KIMM))
- Published : 2013.02.18
Abstract
The conventional thermal chemical vapor deposition (CVD) setup for the graphene synthesis has mainly used convective heat transfer in order to heat a catalyst (e.g. Cu) up to