한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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- Pages.590-590
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- 2013
Direct Growth of Graphene on Boron Nitride/Copper by Chemical Vapor Deposition
- Jin, Xiaozhan (Center for Nano-Characterization, Korea Research Institute of Standards and Science) ;
- Park, J. (Center for Nano-Characterization, Korea Research Institute of Standards and Science) ;
- Kim, W. (Center for Nano-Characterization, Korea Research Institute of Standards and Science) ;
- Hwang, Chanyong (Center for Nano-Characterization, Korea Research Institute of Standards and Science)
- 발행 : 2013.02.18
초록
Direct growth of graphene using CVD method has been done on CVD grown boron nitride substrate. From the SEM image, we have shown that the size of grain of graphene could be clearly controlled by varying the amount of injected hydrocarbon. To convince the existence of graphene on boron nitride, XPS and Raman has been checked. Both B1s and N1s peaks in XPS spectra and the Raman peak around 1,370