한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
- /
- Pages.578-578
- /
- 2013
Synthesized Nanoparticle Trapping in Capacitively Coupled Plasma
- 유광호 (한국과학기술원) ;
-
김정형
(한국표준과학연구원) ;
-
유신재
(한국표준과학연구원) ;
-
성대진
(한국표준과학연구원) ;
-
신용현
(한국표준과학연구원) ;
-
장홍영
(한국과학기술원)
- Yu, Gwang-Ho ;
-
Kim, Jeong-Hyeong
;
-
Yu, Sin-Jae
;
-
Seong, Dae-Jin
;
-
Sin, Yong-Hyeon
;
-
Jang, Hong-Yeong
- 발행 : 2013.02.18
초록
We proposed a method for synthesized nanoparticle trapping in capacitively coupled plasma (CCP) reactor. The nanoparticle in nonthermal plasma can be negatively charged by a charged particle in plasma. Thus, it can be placed between sheath and bulk plasma with zero net force on nanoparticle. However, synthesized nanoparticle can be pumped out due to the neutral drag force when the large size of sheath thickness. We try to make a potential well using the sheath for trapping the synthesized nanoparticle.