한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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- Pages.552-552
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- 2013
Effects of Plasma Surface Treatments Using Dielectric Barrier Discharge to Improve Diamond Films
- Kang, In-Je (Department of Nuclear & Energy Engineering, Jeju National University) ;
- Ko, Min-Guk (Department of Nuclear & Energy Engineering, Jeju National University) ;
- Rai, Suresh (Department of Nuclear & Energy Engineering, Jeju National University) ;
- Yang, Jong-Keun (Department of Nuclear & Energy Engineering, Jeju National University) ;
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Lee, Heon-Ju
(Department of Nuclear & Energy Engineering, Jeju National University)
- 발행 : 2013.02.18
초록
In our study we consider Al2O3 ceramic substrates for Plasma Surface Treatments in order to improve deposited diamond surface and increase diamond deposition rate by applying DBD (Dielectric Barrier Dischrge) system. Because Plasma Surface Treatments was used as a modification method of material surface properties like surface free energy, wettability, and adhesion. By applying Plasma Surface Treatments diamond films are deposited on the Al2O3 ceramic substrates. DC Arc Plasmatron with mathane and hydrogen gases is used. Deposited diamond films are investigated by SEM (Scanning Electron Microscopy), AFM (Atomic Force Microscopy) and XRD (X-ray Diffractometer). Then the C-H stretching of synthetic diamond films by FTIR (Fourier Transform Infrared Spectroscopy) is studied. As a result, nanocrystalline diamond films were identified by using SEM and diamond properties in XRD peaks at (111,