한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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- Pages.530-531
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- 2013
Room Temperature Luminescence from ion Beam or Atmospheric Pressure Plasma Treated SrTiO3
- 송진호 (한국과학기술연구원) ;
- 석재권 (한국과학기술연구원) ;
- 여창수 (한국과학기술연구원) ;
- 이관호 (한국과학기술연구원) ;
- 송종한 (한국과학기술연구원) ;
- 신상원 (삼성디스플레이) ;
- 최진문 (연세대학교) ;
- 조만호 (연세대학교)
- Song, Jin-Ho ;
- Seok, Jae-Gwon ;
- Yeo, Chang-Su ;
- Lee, Gwan-Ho ;
- Song, Jong-Han ;
- Sin, Sang-Won ;
- Choe, Jin-Mun ;
- Jo, Man-Ho
- 발행 : 2013.02.18
초록
3 MeV protonirradiated SrTiO3 (STO) single crystal exhibits a blue and green mixed luminescence. However, the same proton irradiated STO deposited with very thin Pt layer does not show any luminescence. This Pt layer involved in preventing the damage caused by arcingthat comes from tens of kV surface voltage build-up due to secondary electron induced charge up at the surface of insulator during ion beam irradiation. It implies that luminescence of ion irradiated STO originated from the modified STO surface layer caused by arcing rather than direct ion beam irradiation effect. Atmospheric pressure plasma, a simple and cost-effective method, treated STO also exhibits the same kind of blue and green mixed luminescence as the ion beam treated STO, because this plasma also creates a surface damage layer by arcing.