한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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- Pages.434-436
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- 2013
A Study on Thermal Stability of Ga-doped ZnO Thin Films with a $TiO_2$ Barrier Layer
- Park, On-Jeon (Department of Micro Device Engineering, Korea University) ;
- Song, Sang-Woo (Department of Electrical Engineering, Korea University) ;
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Lee, Kyung-Ju
(Department of Electrical Engineering, Korea University) ;
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Roh, Ji-Hyung
(Department of Electrical Engineering, Korea University) ;
- Kim, Hwan-Sun (Department of Micro Device Engineering, Korea University) ;
- Moon, Byung-Moo (Department of Electrical Engineering, Korea University)
- 발행 : 2013.02.18
초록
Ga-doped ZnO (GZO) was substitutes of the SnO2:F films on soda lime glass substrate in the photovoltaic devices such as CIGS, CdTe and DSSC due to good properties and low cost. However, it was reported that the electrical resistivity of GZO is unstable above