한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)

한국진공학회 (The Korean Vacuum Society)
권호 표지

Characteristics and Fabrication of ZTO/Ag/ ZTO Multilayer Transparent Conducting Electrode

  • Cho, Se-Hee (Interface Control Research Center, Korea Institute of Science and Technology) ;
  • Yang, Jeong-Do (Interface Control Research Center, Korea Institute of Science and Technology) ;
  • Wei, Chang-Hwan (Interface Control Research Center, Korea Institute of Science and Technology) ;
  • Pandeyd, Rina (Interface Control Research Center, Korea Institute of Science and Technology) ;
  • Byun, Dong-Jin (Department of Materials Science and Engineering, Korea University) ;
  • Choia, Won-Kook (Interface Control Research Center, Korea Institute of Science and Technology)
  • 발행 : 2013.02.18
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초록

We study on the optical and electrical properties of indium-free ZTO(ZnSnO)/Ag/ZTO (ZAZ) multilayer electrodes for the low-cost transparent electrode. In the first step, each single layer was deposited using rf magnetron in-line sputter with various working pressure based on $O_2$/$Ar+O_2$ ratio (0~3%) and power at room temperature. Secondly, we studied the optical and electrical properties by analyzing the refractive index, extinction coefficient, transmittance and resistivity of each layer. Finally, we optimized the thickness of each layer using macleod simulation program based on the analyzed optical properties and fabricated the multilayer electrode. As a result, We achieved a low sheet resistance of $11{\Omega}$/sq and anaverage transmittance of 80% in the visible region of light (380~780 nm). This indicates that indium-free ZAZ multilayer electrode is a promising low-cost and low-temperature processing electrode scheme.

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