한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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- Pages.218.2-218.2
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- 2013
Substrate Temperature Effects on Structural and Optical Properties of RF Sputtered CdS Thin Films
- 발행 : 2013.08.21
초록
In this study, CdS thin films were deposited onto glass substrates by radio frequency magnetron sputtering. The films were grown at various substrate temperatures in the range of 100 to