한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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- Pages.203.1-203.1
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- 2013
Influence of Growth Temperature for Active Layer and Buffer Layer Thickness on ZnO Nanocrystalline Thin Films Synthesized Via PA-MBE
- Park, Hyunggil (Department of Nano Systems Engineering, Center for Nano Manufacturing, Inje University) ;
- Kim, Younggyu (Department of Nano Engineering, Inje University) ;
- Ji, Iksoo (Department of Nano Engineering, Inje University) ;
- Kim, Soaram (Department of Nano Systems Engineering, Center for Nano Manufacturing, Inje University) ;
- Lee, Sang-Heon (School of Chemical Engineering, Yeungnam University) ;
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Kim, Jong Su
(Department of Physics, Yeungnam University) ;
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Leem, Jae-Young
(Department of Nano Systems Engineering, Center for Nano Manufacturing, Inje University)
- 발행 : 2013.08.21
초록
Zinc oxide (ZnO) nanocrystalline thin films on various growth temperatures for active layer and different buffer layer thickness were grown by plasma-assisted molecular beam epitaxy (PA-MBE) on Si substrates. The ZnO active layer were grown with various growth temperature from 500 to