한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)

한국진공학회 (The Korean Vacuum Society)
권호 표지

Soft Lithography of Graphene Sheets Via Surface Energy Modification

  • Kim, Hansun (Thin Film Materials Research Group, Korea Research Institute of Chemical Technology) ;
  • Jung, Min Wook (Thin Film Materials Research Group, Korea Research Institute of Chemical Technology) ;
  • Myung, Sung (Thin Film Materials Research Group, Korea Research Institute of Chemical Technology) ;
  • Jung, Daesung (Department of Physics, Sungkyunkwan University) ;
  • Lee, Sun Sook (Thin Film Materials Research Group, Korea Research Institute of Chemical Technology) ;
  • Kong, Ki-Jeong (Thin Film Materials Research Group, Korea Research Institute of Chemical Technology) ;
  • Lim, Jongsun (Thin Film Materials Research Group, Korea Research Institute of Chemical Technology) ;
  • Lee, Jong-Heun (Department of Materials Engineering, Korea University) ;
  • Park, Chong Yun (Department of Physics, Sungkyunkwan University) ;
  • An, Ki-Seok (Thin Film Materials Research Group, Korea Research Institute of Chemical Technology)
  • 발행 : 2013.08.21
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초록

With the synthesis of graphene sheets as large-scale and high quality, it is essentially important to develop suitable graphene patterning process for future industrial applications. Especially, transfer or patterning method of CVD-grown graphene has been studied. We report simple soft lithographic process to develop easily applicable patterning method of large-scale graphene sheets by using chemically functionalized polymer stamp. Also important applications, the prototype capacitors with graphene electrode and commercial polymer dielectrics for the electrostatic-type touch panel are fabricated using the developed soft lithographic patterning and transfer process.

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