Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

The Korean Vacuum Society (한국진공학회)
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In-situ Observations of Gas Phase Dynamics During Graphene Growth Using Solid-State Carbon Sources

  • Kwon, Tae-Yang (School of Mechanical and Advanced Materials Engineering, Ulsan National Institute of Science and Technology (UNIST)) ;
  • Kwak, Jinsung (School of Mechanical and Advanced Materials Engineering, Ulsan National Institute of Science and Technology (UNIST)) ;
  • Chu, Jae Hwan (School of Mechanical and Advanced Materials Engineering, Ulsan National Institute of Science and Technology (UNIST)) ;
  • Choi, Jae-Kyung (School of Mechanical and Advanced Materials Engineering, Ulsan National Institute of Science and Technology (UNIST)) ;
  • Lee, Mi-Sun (School of Nano-Biotechnology and Chemical Engineering, Ulsan National Institute of Science and Technology (UNIST)) ;
  • Kim, Sung Youb (School of Mechanical and Advanced Materials Engineering, Ulsan National Institute of Science and Technology (UNIST)) ;
  • Shin, Hyung-Joon (School of Mechanical and Advanced Materials Engineering, Ulsan National Institute of Science and Technology (UNIST)) ;
  • Park, Kibog (Opto-Electronics Convergence Group & Low Dimensional Carbon Materials Center, Ulsan National Institute of Science and Technology (UNIST)) ;
  • Park, Jang-Ung (School of Nano-Biotechnology and Chemical Engineering, Ulsan National Institute of Science and Technology (UNIST)) ;
  • Kwon, Soon-Yong (School of Mechanical and Advanced Materials Engineering, Ulsan National Institute of Science and Technology (UNIST))
  • Published : 2013.08.21
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Abstract

A single-layer graphene has been uniformly grown on a Cu surface at elevated temperatures by thermally processing a poly(methyl methacrylate) (PMMA) film in a rapid thermal annealing (RTA) system under vacuum. The detailed chemistry of the transition from solid-state carbon to graphene on the catalytic Cu surface was investigated by performing in-situ residual gas analysis while PMMA/Cu-foil samples being heated, in conjunction with interrupted growth studies to reconstruct ex-situ the heating process. The data clearly show that the formation of graphene occurs with hydrocarbon molecules vaporized from PMMA, such as methane and/or methyl radicals, as precursors rather than by the direct graphitization of solid-state carbon. We also found that the temperature for vaporizing hydrocarbon molecules from PMMA and the length of time the gaseous hydrocarbon atmosphere is maintained, which are dependent on both the heating temperature profile and the amount of a solid carbon feedstock are the dominant factors to determine the crystalline quality of the resulting graphene film. Under optimal growth conditions, the PMMA-derived graphene was found to have a carrier (hole) mobility as high as ~2,700 cm2V-1s-1 at room temperature, superior to common graphene converted from solid carbon.

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