Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2012.08a
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- Pages.380-381
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- 2012
Fabrication of Artificial Sea Urchin Structure for Light Harvesting Device Applications
- Yeo, Chan-Il (School of Information and Mechatronics, Gwangju Institute of Science and Technology) ;
- Kwon, Ji-Hye (Department of Nanobio Electronics and Materials, Gwangju Institute of Science Technology) ;
- Kim, Joon-Beom (School of Information and Mechatronics, Gwangju Institute of Science and Technology) ;
- Lee, Yong-Tak (School of Information and Mechatronics, Gwangju Institute of Science and Technology)
- Published : 2012.08.20
Abstract
Bioinspired sea urchin-like structures were fabricated on silicon by inductively coupled plasma (ICP) etching using lens-like shape hexagonally patterned photoresist (PR) patterns and subsequent metal-assisted chemical etching (MaCE) [1]. The lens-like shape PR patterns with a diameter of 2