Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2012.02a
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- Pages.346-346
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- 2012
Changes in Electrical and Optical Properties and Chemical States of the Amorphous In-Ga-Zn-O Thin Films Depending on Growth Temperature
- Yoo, Han-Byeol (Department of Physics, Pohang University of Science and Technology) ;
- Thakur, Anup (U.C.o.E., Punjabi University) ;
- Kang, Se-Jun (Department of Physics, Pohang University of Science and Technology) ;
- Baik, Jae-Yoon (Pohang Accelerator Laboratory) ;
- Lee, Ik-Jae (Pohang Accelerator Laboratory) ;
- Park, Jae-Hun (Pohang Accelerator Laboratory) ;
- Kim, Ki-Jeong (Pohang Accelerator Laboratory) ;
- Kim, Bong-Soo (Department of Physics, Pohang University of Science and Technology) ;
- Shin, Hyun-Joon (Department of Physics, Pohang University of Science and Technology)
- Published : 2012.02.08
Abstract
We investigated electrical and optical properties and chemical states of amorphous In-Ga-Zn-O (a-IGZO) thin films deposited at different substrate temperatures (from room temperature to
Keywords
- Amorphous In-Ga-Zn-O;
- a-IGZO;
- InGaZnO;
- Substrate temperature;
- Optical property;
- Electrical property;
- XPS