결정질 실리콘 태양전지의 이중 반사방지막 특성에 대한 연구

Characteristics of Crystalline Silicon Solar Cells with Double Layer Antireflection Coating by PECVD

  • 김진국 (충북대학교 대학원 반도체공학과) ;
  • 박제준 (충남대학교 대학원 전자공학과) ;
  • 홍지화 (충북대학교 대학원 반도체공학과) ;
  • 김남수 (충북대학교 대학원 반도체공학과) ;
  • 강기환 (한국에너지기술연구원 태양에너지연구단) ;
  • 유권종 (한국에너지기술연구원 태양에너지연구단) ;
  • 송희은 (한국에너지기술연구원 태양에너지연구단)
  • Kim, Jin-Kuk (Dept. of Semiconductor Engineering, Chungbuk National University) ;
  • Park, Je-Jun (Dept. of Electronics Engineering, Chungnam National University) ;
  • Hong, Ji-Hwa (Dept. of Semiconductor Engineering, Chungbuk National University) ;
  • Kim, Nam-Soo (Dept. of Semiconductor Engineering, Chungbuk National University) ;
  • Kang, Gi-Hwan (Solar Energy Research Center, Korea Institute of Energy Research) ;
  • Yu, Gwon-Jong (Solar Energy Research Center, Korea Institute of Energy Research) ;
  • Song, Hee-Eun (Solar Energy Research Center, Korea Institute of Energy Research)
  • 발행 : 2012.03.29

초록

The paper focuses on an anti-reflection (AR) coating deposited by PECVD in silicon solar cell fabrication. AR coating is effective to reduce the reflection of the light on the silicon wafer surface and then increase substantially the solar cell conversion efficiency. In this work, we carried out experiments to optimize double AR coating layer with silicon nitride and silicon oxide for the silicon solar cells. The p-type mono crystalline silicon wafers with $156{\times}156mm^2$ area, 0.5-3 ${\Omega}{\cdot}cm$ resistivity, and $200{\mu}m$ thickness were used. All wafers were textured in KOH solution, doped with $POCl_3$ and removed PSG before ARC process. The optimized thickness of each ARC layer was calculated by theoretical equation. For the double layer of AR coating, silicon nitride layer was deposited first using $SiH_4$ and $NH_3$, and then silicon oxide using $SiH_4$ and $N_2O$. As a result, reflectance of $SiO_2/SiN_x$ layer was lower than single $SiN_x$ and then it resulted in increase of short-circuit current and conversion efficiency. It indicates that the double AR coating layer is necessary to obtain the high efficiency solar cell with PECVD already used in commercial line.

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