Evaluation method of isolation performance for MIMO isolation table using singular value of transmissibility matrix

전달율 행렬의 특이치를 이용한 다입력/다출력 제진대계의 절연성능 평가법

Isolation tables are widely used for precision equipments and their isolation performances have been usually expressed and evaluated by transsmissibility. However, transmissibility is a concept for 1-degree of freedom(DOF) system. In practice, isolation tables are supproted by more than 4 springs. Each spring is subjected to vertical and horizontal ground vibrations, and also the table has more than 1-DOF. Therefore, isolation tables should be treated as multi-input/multi-output(MIMO) system of which isolation performance is expressed by transmissibility matrix. However, the matrix is too complicated to be an index for a system. In this paper, maximum singular value of transmissibility matrx is suggested as a simple performance index of a MIMO isolation system. Physical meaning of singular value is explained using a simple a 2-DOF isolation table. Furthermore, maximum singular values of passive, 3-DOF active and 6-DOF active isolation tables are obtained through experiments, and their meaning are explained and compared with each other.