Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2011.08a
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- Pages.161-161
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- 2011
TiO2 Nanotubes Fabricated by Atomic Layer Deposition for Solar Cells
- Jung, Mi-Hee (Thin Film Solar Cell Technology Research Team, Advanced Solar Technology Research) ;
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Kang, Man-Gu
(Department, Convergence Components and Materials Research Laboratory, Electronics and Telecommunications Research Institute)
- Published : 2011.08.17
Abstract
Titanium (IV) dioxide (TiO2) is one of the most attractive d-block transition metal functional oxides. Many applications of TiO2 such as dye-sensitized solar cells and photocatalyst have been widely investigated. To utilize solar energy efficiently, TiO2 should be well-aligned with a high surface area and promote the charge separation as well as electron transport. Herein, the TiO2 nanotubes were successfully fabricated by a template-directed method. The electrospun PEO(Polyethylene oxide, Molecular weight, 400k)fibers were used as a soft template for coating with titanium dioxide using an atomic layer deposition (ALD) technique. The deposition was conducted onto a template at 50