Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2011.08a
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- Pages.150-150
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- 2011
Electron-neutral Collision Frequency Measurement Using Cutoff Method
- Yu, Gwang-Ho ;
- Kim, Dae-Ung ;
- Na, Byeong-Geun ;
- Jang, Hong-Yeong ;
- Yu, Sin-Jae ;
- Kim, Jeong-Hyeong ;
- Seong, Dae-Jin ;
- Sin, Yong-Hyeon
- 유광호 (한국과학기술원) ;
- 김대웅 (한국과학기술원) ;
- 나병근 (한국과학기술원) ;
- 장홍영 (한국과학기술원) ;
- 유신재 (표준과학연구원) ;
- 김정형 (표준과학연구원) ;
- 성대진 (표준과학연구원) ;
- 신용현 (표준과학연구원)
- Published : 2011.08.17
Abstract
Electron-neutral collision frequency is one of the important parameters in the plasma physics. Recently, It is employed to monitor the plasma processing in industrial plasma engineering [1]. Using the wave-cutoff probe with network analyzer, the plasma impedance was measured in inductively coupled argon plasma and analyzed to determine the resonance frequency. The electron-neutral collision frequency is directly calculated from the resonance frequency. The calculated electron-neutral collision frequency is good agree with reference which is calculated by measured EEDF using single langmuir probe (SLP).