한국재료학회:학술대회논문집 (Proceedings of the Materials Research Society of Korea Conference)
- 한국재료학회 2011년도 추계학술발표대회
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- Pages.28.1-28.1
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- 2011
Amorphous Carbon Films on Ni using with $CBr_4$ by Thermal Atomic Layer Deposition
초록
We deposited the carbon films on Ni substrates by thermal atomic layer deposition (th-ALD), for the first time, using carbon tetrabromide (