Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2011.10a
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- Pages.14-14
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- 2011
Abnormal Behavior of MOCVD Grown $Al_xIn_{1-x}N$ Observed by Various Material Characterizations
- Chung, Roy Byung-Kyu (University of California Santa Barbara) ;
- DenBaars, Steven P. (University of California Santa Barbara) ;
- Speck, James S. (University of California Santa Barbara) ;
- Nakamura, Shuji (University of California Santa Barbara)
- Published : 2011.10.27
Abstract
AlInN has been studied extensively over the past few years due to its interesting material properties that are not present in other ternary nitrides. However, basic material study of AlInN has not been reported as much compared to device applications due to the difficulty in the growth. We have performed the material studies from various aspects. A secondary ion mass spectrometry (SIMS) has shown high oxygen content above