Study of thin film surface hardening by UV wavelength

UV 파장 변화에 따른 박막 표면 경화 연구

  • Yu, S.Y. (Samsung Electro-Mechanics Manufacturing Engineering Group) ;
  • Kim, S.K. (Samsung Electro-Mechanics Manufacturing Engineering Group) ;
  • Kim, S. (Samsung Electro-Mechanics Manufacturing Engineering Group) ;
  • Bong, E.H. (Samsung Electro-Mechanics Manufacturing Engineering Group)
  • Published : 2011.06.01