Chemical etching을 이용한 W probe shape 결정

Shape decision of W probe using Chemical etching

  • Kim, S.K. (Samsung Electro-Mechanics Manufacturing Engineering Group) ;
  • Yu, S.Y. (Samsung Electro-Mechanics Manufacturing Engineering Group) ;
  • Kim, S. (Samsung Electro-Mechanics Manufacturing Engineering Group) ;
  • Bong, E.H. (Samsung Electro-Mechanics Manufacturing Engineering Group)
  • 발행 : 2011.06.01