현장타설 말뚝 공법의 지반진동이 정밀장비에 미치는 영향성 평가

The Study on The Evaluation of The Ground Vibration of Cast in Place Concrete Pile Method Effect to Precision Equipment

The size of TV and TFT-LCD are bigger and bigger for the next generation exposure equipment install that existing fab are getting a lot of additions. When the new fab build an extension that the shortening of the construction and non-vibration are use cast in place concrete pile method. In this study when lay the foundation of existing fab adjoin use vibration monitoring system are rotator type all casing method among cast in place concrete pile method. The evaluation of ground vibration of rotator type all casing method effect to precision equipment and vibration area of influence.