Structural design revision of KRISS profilometer for improved measurement accuracy

The previous KRISS profilometer design used an aluminum profile structure to which a bar-type reference mirror subsystem and the measurement subsystem are mounted. The earlier design suffers from low stiffness as shown from the first resonance mode of 45.1 Hz. The improved mechanical design we describe in this study replaces the aluminium profile structure with a granite structure of $1340{\times}220{\times}230$ in dimension. The finite element analysis results for the revised design show 0.001 degree in probe contact angle variation. The first resonance mode was computed to 91.2 Hz that is much better than 45.1 Hz from the previous design. We describe the improved design, structural analysis results and how these results would satisfy the form accuracy requirement of 1 ${\mu}m$ PV.