터보분자펌프의 회전체 동해석

Rotordynamic Analysis of a Turbomolecular Pump

In this paper, rotordynamic analyses of the Campbell diagram, critical speeds, and harmonic responses for a TMP rotor system are performed. Since the finite element model of the TMP rotor system has a very large number of degrees of freedom because of its complex geometry, and dynamic analyses for investigating the critical speeds, stability, and harmonic response are repeated for various design parameters, model order reduction (MOR) is necessary to reduce the computational cost. The Krylov-based model order reduction via moment matching significantly speeds up the rotordynamic analyses for the TMP rotor system.