Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2010.08a
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- Pages.229-229
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- 2010
non-polar a-plane GaN growth on r-plane sapphire substrate by MOCVD
- Son, Ji-Su (Green-energy Research Center, Korea Electronics Technology Institute) ;
- Baek, Kwang-Hyun (Green-energy Research Center, Korea Electronics Technology Institute) ;
- Kim, Ji-Hoon (Green-energy Research Center, Korea Electronics Technology Institute) ;
- Song, Hoo-Young (Green-energy Research Center, Korea Electronics Technology Institute) ;
- Kim, Tae-Geun (Department of Electronic Engineering, Korea University) ;
- Hwang, Sung-Min (Green-energy Research Center, Korea Electronics Technology Institute)
- Published : 2010.08.18
Abstract
We report a high crystalline nonpolar a-plane (11-20) GaN on r-plane (1-102) sapphire substrates with
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