Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2010.08a
- /
- Pages.187-187
- /
- 2010
Resistance Switching Characteristics of Metal/TaOx/Pt with Oxidation degree of metal electrodes
- Na, Hee-Do (Department of Materials Science and Engineering, Yonsei University) ;
- Kim, Jong-Gi (Department of Materials Science and Engineering, Yonsei University) ;
- Sohn, Hyun-Chul (Department of Materials Science and Engineering, Yonsei University)
- Published : 2010.08.18
Abstract
In this study, we investigated the effect of electrodes on resistance switching of TaOx film. Pt, Ni, TiN, Ti and Al metal electrodes having the different oxidation degree were deposited on TaOx/Pt stack. Unipolar resistance switching behavior in Pt or Ni/TaOx/Pt MIM stacks was investigated, but bipolar resistance switching behavior in TiN, Ti or Al /TaOx/Pt MIM stacks was shown. We investigated that the voltage dependence of capacitance was decreased with higher oxidation degree of metal electrodes. Through the C-V results, we expected that linearity (
Keywords