한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2010년도 제39회 하계학술대회 초록집
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- Pages.171-171
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- 2010
Reproducible Resistance Switching and Physical Characteristics of TiOx films with Oxidation Temperature and Time
- Kim, Jong-Gi (Department of Materials Science and Engineering, Yonsei University) ;
- Na, Hee-Do (Department of Materials Science and Engineering, Yonsei University) ;
- Sohn, Hyun-Chul (Department of Materials Science and Engineering, Yonsei University)
- 발행 : 2010.08.18
초록
In this work, we investigated the effect of the oxidation temperature on the unipolar and bipolar resistance switching behaviors of the oxidized TiO-x films. TiOx films on Pt electrodes were fabricated by the oxidation of Ti films at
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