한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2010년도 제39회 하계학술대회 초록집
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- Pages.94-94
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- 2010
Gas phase diagnostics of high-density $SiH_4/H_2$ microwave plasma
- Toyoda, Hirotaka (Department of Electrical Engineering and Computer Science, Nagoya University) ;
- Kuroda, Toshiyuki (Department of Electrical Engineering and Computer Science, Nagoya University) ;
- Ikeda, Masahira (Department of Electrical Engineering and Computer Science, Nagoya University) ;
- Sakai, Junji (Department of Electrical Engineering and Computer Science, Nagoya University) ;
- Ito, Yuki (Department of Electrical Engineering and Computer Science, Nagoya University) ;
- Ishijima, Tatsuo (Plasma Nanotechnology Research Center, Nagoya University)
- 발행 : 2010.08.18
초록
As a new plasma source for the plasma enhanced chemical vapor deposition (PCVD) of
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