Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2010.08a
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- Pages.94-94
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- 2010
Gas phase diagnostics of high-density $SiH_4/H_2$ microwave plasma
- Toyoda, Hirotaka (Department of Electrical Engineering and Computer Science, Nagoya University) ;
- Kuroda, Toshiyuki (Department of Electrical Engineering and Computer Science, Nagoya University) ;
- Ikeda, Masahira (Department of Electrical Engineering and Computer Science, Nagoya University) ;
- Sakai, Junji (Department of Electrical Engineering and Computer Science, Nagoya University) ;
- Ito, Yuki (Department of Electrical Engineering and Computer Science, Nagoya University) ;
- Ishijima, Tatsuo (Plasma Nanotechnology Research Center, Nagoya University)
- Published : 2010.08.18
Abstract
As a new plasma source for the plasma enhanced chemical vapor deposition (PCVD) of
Keywords