Electrochemical Potentiostatic Activation & Its Application for Enhancing blue LED Efficiency

A novel electrochemical potentiostatic method has been examined in order to enhance the hole concentration of p-type GaN thin films using KOH and HCl electrolyte. The hole concentration was increased more than 2 times by the electric voltge apply with the mobility of $10{\sim}12cm^2/V.s$. At optimum condition of 3V apply, hole concentration was enhanced more than reference sample from $1.7{\times}10^{-17}cm^{-3}$ to $4.1{\times}10^{-17}cm^{-3}$. Application of this activation method to blue-LED fabrication improved optical output from 18.4mW to 20.6mW, that is ~12% increase. SIMS analysis indicates that nearly 70% of hydrogen atoms could be removed by this method.