한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2010년도 하계학술대회 논문집
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- Pages.262-262
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- 2010
수소량에 따른 그라핀의 두께와 결함 변화
The effect of hydrogen flow rate on defects and thickness uniformity in graphene
- An, Hyo-Sub (Sejong University) ;
- Kim, Eun-Ho (Sejong University) ;
- Jang, Hyun-Chul (Sejong University) ;
- Cho, Won-Ju (Kwangwoon University) ;
- Lee, Wan-Kyu (National Nano Fab Center) ;
- Jung, Jong-Wan (Sejong University)
- 발행 : 2010.06.16
초록
To investigate the effect of the amount of hydrogen on CVD grown-graphene, the flow rate of hydrogen was changed, while other process parameters were kept constant during CVD synthesis. Substrate which consists of 300nm-nickel/