A study on Dry Etching for Lage Area Multi-Cystalline Silicon Solar Cell

대면적 다결정 실리콘 태양전지 제작을 위한 건식식각에 관한 연구

  • 한규민 (충남대학교 전자.전파.정보통신공학부) ;
  • 유진수 (한국에너지기술연구원 태양광연구단) ;
  • 유권종 (한국에너지기술연구원 태양광연구단) ;
  • 권준영 (충북대학교 전기공학과) ;
  • 최성진 (한국에너지기술연구원 태양광연구단) ;
  • 이희덕 (충남대학교 전자.전파.정보통신공학부)
  • Published : 2010.06.16

Abstract

This paper two different etching, HF : HNO3 :DI and RIE were used for etching in multi-crystalline Silicon(Mc-Si) solar cell fabrication. The wafers etched in RIE texture showed low reflectance compared to the wafers etched in Acid soultion after SiNx deposition. In light current-voltage results, the cells etched in RIE texture exhibited higher short circuit current and open circuit voltage than those of the cells etched in acid solution. We have obtained 15.1% conversion efficiency in large area($156cm^2$) Multi-Si solar cells etched in RIE texture.

Keywords