Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Design and analysis of AlN piezoelectric micro generators suitable with integration

집적화에 적합한 진동형 AlN 압전 마이크로 발전기의 설계와 해석

  • Published : 2010.06.16
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Abstract

This paper describes the design and analysis of AlN piezoelectric micro generator. The generator was designed to convert ambient vibration energy to electrical power as a AlN piezoelectric material compatible with integataion process. From the simulation results, the resonance frequency of designed model is about 360 Hz and analyzed the bending mode, displacement and expectation output.

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