한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2010년도 하계학술대회 논문집
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- Pages.204-204
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- 2010
3차원 LTCC 기판을 이용한 PZT 압력센서의 주파수 응답 특성
Frequency response characteristics of PZT pressure sensor using three dimensional LTCC substrates
- Hur, Won-Young (SungKyunKwan University) ;
- Lee, Kyung-Chun (SungKyunKwan University) ;
- Hwang, Hyun-Suk (Seoil University) ;
- Lee, Tae-Yong (SungKyunKwan University) ;
- Song, Joon-Tae (SungKyunKwan University)
- 발행 : 2010.06.16
초록
A development of device with reduced size and improved sensitivity is highly impotant Pb(Zr,Ti)