한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2010년도 하계학술대회 논문집
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- Pages.135-135
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- 2010
RF-Magnetron Sputtering법을 이용한 IGZO박막의 기판온도에 따른 특성분석
IGZO Films Using RF-Magnetron Sputtering Method of Analysis of the substrate temperature
- Kim, Mi-Sun (Catholic University of Daegu) ;
- Kim, Dong-Young (Catholic University of Daegu) ;
- Bae, Kang (Catholic University of Daegu) ;
- Shon, Sun-Young (Catholic University of Daegu) ;
- Kim, Hwa-Min (Catholic University of Daegu)
- 발행 : 2010.06.16
초록
본 연구에서는 ZnO를 기반으로 하여