Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2010.06a
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- Pages.103-103
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- 2010
Dependence Analysis of Radical and Ion Densities on Plasma Parameters in $Cl_2$ /Ar Discharges
$Cl_2$ /Ar 방전에서의 플라즈마 변수에 대한 이온과 라디칼 밀도 의존성 분석
- An, Choong-Gi (Chungbuk National University) ;
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Kwon, Deuk-Chul
(National Fusion Research Institute) ;
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Yu, Sin-Jae
(Korea Research Institute of Standards and Science) ;
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Kim, Jeong-Hyeong
(Korea Research Institute of Standards and Science) ;
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Yoon, Nam-Sik
(Chungbuk National University)
- Published : 2010.06.16
Abstract
Dependence of radical and ion densities on Plasma Parameters is theoretically investigated in